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New Developments in Metal Ion Implantation by Vacuum Arc Ion Sources and Metal Plasma Immersion

Author(s):
Brown, I. G.
Anders, A.
Anders, S.
Dickinson, M. R.
MacGill, R. A.
Monteiro, O. R.
Oks, E. M.
Raoux, S.
Wang, Z.
Yushkov, G.
5 more
Publication title:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
396
Pub. Year:
1996
Page(from):
467
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992993 [1558992995]
Language:
English
Call no.:
M23500/396
Type:
Conference Proceedings

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