Blank Cover Image

Study of Diamond Nucleation on Silicon Using Direct Negative Carbon Ion Beam Source

Author(s):
Publication title:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
396
Pub. Year:
1996
Page(from):
221
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992993 [1558992995]
Language:
English
Call no.:
M23500/396
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings A Novel Rectilinear Negative Carbon Ion Beam Source for Large-Area Amorphous Diamond Like Carbon Coatings

Sohn, M. H., Ahn, Y. O., Ko, Y. W., Park, Y., Kim, S. I.

MRS - Materials Research Society
7 Conference Proceedings Application of chemically amplified resist to 10-keV e-beam system

Ahn,S., Kim,C., Yang,S.-H., Moon,S.-Y., Choi,S.-W., Han,W.-S., Sohn,J.-M.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Design of a Compact Negative Metal Ion Beam Source for Surface Studies

Park, Y., Ko, Y. W., Sohn, M. H., Kim, S. I.

MRS - Materials Research Society
8 Conference Proceedings Dust Removal Using Electrode-Plates Coated with Activated Carbon

T.W. Jun, H.C. Park, K.H. Ahn, M. Sajjad, K.S. Kim

Trans Tech Publications
3 Conference Proceedings Growth of Low-Temperature Polycrystalline Si Film by Direct Negative Si Ion Beams

Sohn, M. H., Kim, D., Ahn, Y. O., Kim, S. I.

MRS - Materials Research Society
9 Conference Proceedings Inhibition Mechanism of Magnesium Ion on Carbonation Reaction with Ca(OH)2 and CO2

Kim, J.H., Ahn, J.W., Ko, S.J., Park, W.K., Han, C.

Trans Tech Publications
4 Conference Proceedings Carbon Nitride Formation by Plasma Assisted Ion Beam Deposition

Tompa, G. S., Murzin, I. H., Kim, S. I., Ahn, Y. O., Gallois, B., Fischer, T. E., Forsythe, E. W.

MRS - Materials Research Society
10 Conference Proceedings Fast Inspection of Non-Visual Defects in the Wafer Surface Using Two Low-Energy E-Beam Sources

S.J. Ahn, T.S. Oh, D.W. Kim, H.S. Kim

Trans Tech Publications
5 Conference Proceedings *Field emission from carbon films deposited by controlled-low-energy beams and CVD sources

Lowndes, Douglas H., Merkulov, Vladimir I., Baylor, L. R., Jellison, G. E. Jr., Poker, D. B., Kim, S., Sohn, M. H., …

MRS-Materials Research Society
11 Conference Proceedings Effect of Diamond-Like Carbon Overcoats on VOR Performance

Lee, J.-W, Kim, S.H., Park, Y.S., Shinn, M.N., Kang, D.H., Voon, S.Y, Kim, D.S., Park, T.S., Ha, S.H., Lee, J.-H., Kim, …

Electrochemical Society
6 Conference Proceedings Study of the beam blur and its effect on the future mask fabrication [6349-33]

Lee, S., Park, S., Ahn, M., Doh, J., Kim, S., Kim, B., Choi, S., Han, W.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Carbon Nitride Films Formed Using Sputtering and Negative Carbon Ion Sources

Murzin, I. H., Tompa, G. S., Wei, J., Muratov, V., Fischer, T. E., Yakovlev, V.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12