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Direct Wafer Bonding of Preamorphized Silicon Wafers

Author(s):
Laporte, A.
Sarrabayrouse, G.
Benamara, M.
Claverie, A.
Rocher, A.
Lescouzeres, L.
PeyreLavigne, A.
2 more
Publication title:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
378
Pub. Year:
1995
Page(from):
869
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992818 [1558992812]
Language:
English
Call no.:
M23500/378
Type:
Conference Proceedings

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