SCALING ANALYSIS OF α- AND poly-Si SURFACE ROUGHNESS BY ATOMIC FORCE MICROSCOPY

SCALING ANALYSIS OF α- AND poly-Si SURFACE ROUGHNESS BY ATOMIC FORCE MICROSCOPY

Author(s):

Publication title:

Fractal aspects of materials : symposium held November 28-December 1, 1994, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

367

Pub. Year:

1995

Page(from):

329

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992689 [1558992685]

Language:

English

Call no.:

M23500/367

Type:

Conference Proceedings

Details

TDL ID:	ZA00017049
Series ID:	PA00000011
Conf. info. (Name):	Symposium on fractal aspects of materials
Conf. info. (Number):	1994
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1994.11.28-1994.12.01

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