INTRINSIC STRESS IN SPUTTERED THIN FILMS
- Author(s):
- Publication title:
- Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 356
- Pub. Year:
- 1995
- Page(from):
- 131
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992573 [155899257X]
- Language:
- English
- Call no.:
- M23500/356
- Type:
- Conference Proceedings
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