Excimer laser machining of advanced materials

Author(s):

• Tonshoff,H.K. ( Laser Zentrum Hannover eV )
• Alvensleben,F.von
• Heekenjann,P.B.
• Willmann,G.

Publication title:

Excimer lasers, optics, and applications : 12-13 February 1997, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2992

Pub. Year:

1997

Page(from):

108

Page(to):

118

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424037 [081942403X]

Language:

English

Call no.:

P63600/2992

Type:

Conference Proceedings