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UV and gas interactions in an enclosed 193-nm excimer laser beamline

Author(s):
Elliot,D.J. ( Excimer Laser Systems,Inc. )
Camp,J.C.
Harlow,W.C.
Dosoretz,V.
Behr,D.
Callahan,G.P.
Flint,S.
2 more
Publication title:
Excimer lasers, optics, and applications : 12-13 February 1997, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2992
Pub. Year:
1997
Page(from):
51
Page(to):
63
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424037 [081942403X]
Language:
English
Call no.:
P63600/2992
Type:
Conference Proceedings

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