Flexible distributed architecture for semiconductor process control and experimentation

Flexible distributed architecture for semiconductor process control and experimentation

Author(s):

Gower,A.E. ( Massachusetts Institute of Technology )
Boning,D.S.
Mcllrath,M.B.

Publication title:

Open Architecture Control Systems and Standards

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2912

Pub. Year:

1997

Page(from):

146

Page(to):

158

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819423146 [0819423149]

Language:

English

Call no.:

P63600/2912

Type:

Conference Proceedings

Details

TDL ID:	ZA00017031
Series ID:	PA00000029
Conf. info. (Name):	Photonics East : Open Architecture Control Systems and Standards
Conf. info. (Number):	1996
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1996.11.20-1996.11.21

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