Optimization of polishing parameters in computer-controlled optical polishing process

Author(s):

• Zhang,X. ( Chang Chun Institute of Optics and Fine Mechanics )
• Yu,J.
• Zhang,Z.

Publication title:

Laser interferometry VIII : applications : 8-9 August, 1996, Denver Colorado

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2861

Pub. Year:

1996

Page(from):

296

Page(to):

298

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422491 [0819422495]

Language:

English

Call no.:

P63600/2861

Type:

Conference Proceedings