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New type of common-path heterodyne profilometer

Author(s):
Publication title:
Laser interferometry VIII : applications : 8-9 August, 1996, Denver Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2861
Pub. Year:
1996
Page(from):
269
Page(to):
271
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422491 [0819422495]
Language:
English
Call no.:
P63600/2861
Type:
Conference Proceedings

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