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Fabricating subcollimating grids for an x-ray solar imaging spectrometer using LIGA techniques

Author(s):
Brennen,R.A. ( Jet Propulsion Lab. )
Hecht,M.H.
Wiberg,D.V.
Manion,S.J.
Bonivert,W.D.
Hruby,J.M.
Scholz,M.L.
Stowe,T.D.
Kenny,T.W.
Jackson,K.H.
Malek,C.Khan
6 more
Publication title:
Microlithography and Metrology in Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2640
Pub. Year:
1995
Page(from):
214
Page(to):
225
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420060 [0819420069]
Language:
English
Call no.:
P63600/2640
Type:
Conference Proceedings

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