Oxygen Precipitation in CZ Silicon Crystals Contaminated with Iron

Oxygen Precipitation in CZ Silicon Crystals Contaminated with Iron

Author(s):

Publication title:

Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995

Title of ser.:

Materials science forum

Ser. no.:

196-201

Pub. Year:

1995

Pt.:

4

Page(from):

1859

Page(to):

1864

Pub. info.:

Zurich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878497164 [0878497161]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00020219
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Defects in Semiconductors : ICDS
Conf. info. (Number):	18th
Conf. info. (Venue):	Sendai, Japan
Conf. info. (Date):	1995.07.23-1995.07.28

Similar Items:

1 Conference Proceedings Subsurface Damage in Single Diamond Tool Machined Si Wafers Mchedlidze,T.R., Yonenaga,I., Sumino,K. Trans Tech Publications	7 Conference Proceedings FTIR study of oxygen precipitation in high-pressure-treated Cz-Si contaminated by transition metals Surma,B., Misiuk,A., Mozdzonek,M., Hartwig,J., Prieur,E. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Electrical Transport in SixGe1-x Bulk AIloys Mchedlidze,T.R., Yonenaga,I., Matsui,A., Sumino,K. Trans Tech Publications	8 Conference Proceedings NITROGEN-OXYGEN COMPLEXES IN SILICON Suezawa, M., Sumino, K. Materials Research Society
3 Conference Proceedings Precipitation of Cu,Ni and Fe on Frank-Type Partial Dislocations in Czochralski-Grown Silicon Shen,B., Sekiguchi,T., Sumino,K. Trans Tech Publications	9 Conference Proceedings Precipitation of iron in FZ and CZ silicon Hieslmair,H., Istratov,A.A., McHugo,S.A., Flink,C., Weber,E.R. Trans Tech Publications
4 Conference Proceedings Interaction between Supersaturated Transition Metals(Cu,Ni,Fe)and Extended Defects in CZ-Si Jablonski,J., Kaniewski,J., Kaniewska,M., Sekiguchi,T., Ornoch,L., Sumino,K. Trans Tech Publications	10 Conference Proceedings The role of Oxygen Impurities in the Formation of Grown-in Laser Scattering Tomography Defects in Silicon Single Crystals Nishimura, M., Yamaguchi, Y., Nakamura, K., Jablonski, J., Watanabe, M. Electrochemical Society
5 Conference Proceedings EBIC Study of Fe Precipitation on Bulk Stacking Fault in Czochralski-Grown Silicon Shen, B., Sekiguchi, T., Chen, P., Yang, K., Chen, Z. Z., Zheng, Y. D., Sumino, K. MRS - Materials Research Society	11 Conference Proceedings EFFECTS OF CARBON CONCENTRATION UPON OXYGEN PRECIPITATION IN CZ Si Hahn, S., Arst, M., Ritz, K. N., Shatas, S., Stein, H. J., Rek, Z. U., Tiller, W. A. Materials Research Society
6 Conference Proceedings Relation Between Oxygen Precipitation and Minority Carrier Lifetime in Cz-Si Crystal Lee, B.-Y., Park, B.-M., Hwang, D.-H., Kwon, O-J. Electrochemical Society	12 Conference Proceedings A Vacancy/Oxygen Based Model Describing Radial Distribution of Voids, OSF-Ring, and AOP in Ring Structure of Cz Silicon Crystals Bae, K.-M., Rozgonyi, G., Kim, J.-R., Oh, H.-S. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12