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Use of novel photoresists in the production of submillimetre wave integrated circuits

Author(s):
Collins, C.E. ( University of Nottingham, UK )
Miles, R.E.
Parkhurst, G.M.
Digby, J.W.
Kazemi, H.
Chamberlain, J.M.
Pollard, R.D.
Cronin, N.J.
Davies, S.R.
Bowen, J.W.
Steenson, D.P.
6 more
Publication title:
Millimeter and Submillimeter Waves IV : 20-23 July 1998, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3465
Pub. Year:
1998
Page(from):
164
Page(to):
168
Pub. info.:
Bellingham, Wash., USA: SPIE
ISSN:
0277786X
ISBN:
9780819429209 [0819429201]
Language:
English
Call no.:
P63600/3465
Type:
Conference Proceedings

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