Metrology for spatial interferometry IV
- Author(s):
- Gursel,Y. ( Jet Propulsion Lab. )
- Publication title:
- Small spacecraft, space environments, and instrumentation technologies : 27-28 July 1997, San Diego, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3116
- Pub. Year:
- 1997
- Page(from):
- 12
- Page(to):
- 26
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819425386 [0819425389]
- Language:
- English
- Call no.:
- P63600/3116
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Optical spatial heterodyned interferometry for applications in semic:onductor inspection and metrology (Invited Paper) [6162-03]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
6
Conference Proceedings
Preliminary results for mask metrology using spatial heterodyne interferometry
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |