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Optical and electrical properties of a-Si1-xCx:H and ｦﾌc-Si1-xCx:H films perpared by using a methane and xylene source

Author(s):
Ma,T. ( Nanjing Univ.(China) )
Xu,J. ( Nanjing Univ.(China) )
Wang,L. ( Nanjing Univ.(China) )
Huang,X. ( Nanjing Univ.(China) )
Du,J. ( Nanjing Univ.(China) )
Li,W. ( Nanjing Univ.(China) )
Chen,K. ( Nanjing Univ.(China) )
2 more
Publication title:
Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3175
Pub. Year:
1998
Page(from):
446
Page(to):
450
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426734 [0819426733]
Language:
English
Call no.:
P63600/3175
Type:
Conference Proceedings

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