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Transmission electron microscopy of defects in NMOS and PMOS structures

Author(s):
Bourdillon,A.J. ( National Univ.of Singapore )
Koh,Y.G. ( National Univ.of Singapore )
Chiang,S.L. ( National Univ.of Singapore )
Lim,C.W. ( National Univ.of Singapore )
Kong,J.R. ( National Univ.of Singapore )
Guobing,C. ( Singapore Productivity and Standards Board )
1 more
Publication title:
Microlithographic Techniques in IC Fabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3183
Pub. Year:
1997
Page(from):
236
Page(to):
242
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426109 [0819426105]
Language:
English
Call no.:
P63600/3183
Type:
Conference Proceedings

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