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Direct patterning of electrodeposited polythiophene thin films by ultraviolet laser ablation

Author(s):
Hu,X. ( Nanyang Technological Univ.(Singapore) )
Wong,T.K.S. ( Nanyang Technological Univ.(Singapore) )
Gao,S. ( Nanyang Technological Univ.(Singapore) )
Liu,H.M. ( Nanyang Technological Univ.(Singapore) )
Lam,Y.L. ( Nanyang Technological Univ.(Singapore) )
Chan,Y.C. ( Nanyang Technological Univ.(Singapore) )
Xu,F.L. ( Nanyang Technological Univ.(Singapore) )
2 more
Publication title:
Microlithographic Techniques in IC Fabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3183
Pub. Year:
1997
Page(from):
57
Page(to):
65
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426109 [0819426105]
Language:
English
Call no.:
P63600/3183
Type:
Conference Proceedings

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