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In-line charge-trapping characterization of dielectrics for sub-0.5-ｦﾌm CMOS technologies (Invited Paper)

Author(s):
  • Roy,P.K. ( Lucent Technologies Bell Labs. )
  • Chacon,C.M. ( Lucent Technologies Bell Labs. )
  • Ma,Y. ( Lucent Technologies Bell Labs. )
  • Homer,C.S. ( Keithley Instruments,Inc. )
Publication title:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3215
Pub. Year:
1997
Page(from):
70
Page(to):
83
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426475 [0819426474]
Language:
English
Call no.:
P63600/3215
Type:
Conference Proceedings

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