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Measuring frequency response of surface-micromachined resonators

Author(s):
Publication title:
Microlithography and Metrology in Micromachining III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3225
Pub. Year:
1997
Page(from):
32
Page(to):
43
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426574 [0819426571]
Language:
English
Call no.:
P63600/3225
Type:
Conference Proceedings

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