Fuzzy logic connectivity in semiconductor defect clustering
- Author(s):
- Karnowski,T.P. ( Oak Ridge National Lab. )
- Gleason,S.S. ( Oak Ridge National Lab. )
- Tobin,K.W.,Jr. ( Oak Ridge National Lab. )
- Publication title:
- Machine vision applications in industrial inspection VI : 27 January 1998, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3306
- Pub. Year:
- 1998
- Page(from):
- 44
- Page(to):
- 53
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427465 [0819427462]
- Language:
- English
- Call no.:
- P63600/3306
- Type:
- Conference Proceedings
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