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Anistropic Trench Etching and Diffusion Studies for the Fabricalion of mm-wave Pin-Diode Array Switches

Author(s):
Dahiya,K.K.
Khosla,Y.P.
Jagbir Singh
Singh,D.V.
Gupta,A.P
Praveen Kumar
Bhattacharya,D.K.
Datta,P.
Kesavan,R.
4 more
Publication title:
Physics of - Semiconductor Devices -
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3316
Pub. Year:
1998
Vol.:
Part 2
Page(from):
904
Page(to):
905
Pub. info.:
New Delhi: Narosa Publishing House
ISSN:
0277786X
ISBN:
9780819427564 [081942756X]
Language:
English
Call no.:
P63600/3316
Type:
Conference Proceedings

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