Low Temperature Oxidation of Strained-Si in Microwave Plasma

Low Temperature Oxidation of Strained-Si in Microwave Plasma

Author(s):

Publication title:

Physics of - Semiconductor Devices -

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3316

Pub. Year:

1998

Vol.:

Part 1

Page(from):

592

Page(to):

594

Pub. info.:

New Delhi: Narosa Publishing House

ISSN:

0277786X

ISBN:

9780819427564 [081942756X]

Language:

English

Call no.:

P63600/3316

Type:

Conference Proceedings

Details

TDL ID:	ZA00016921
Series ID:	PA00000029
Conf. info. (Name):	International Workshop on the Physics of Semiconductor Devices - IWDPSD
Conf. info. (Number):	1997 : 9th
Conf. info. (Venue):	Delhi, India
Conf. info. (Date):	1997.12.16-1997.12.20

Similar Items:

1 Conference Proceedings Temperature Dependence of Electrical Properities of Ultrathin Nitrided Oxide Grown on Strained-SiGe by Rapid Thermal Oxidation Samanta, S.K., Chatterjee, S., Bera, L.K., Banerjee, H.D., Maiti, C.K. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Deposition of Stoichiometric SiO2 on Silicon-Germanium Strained Layers Senapati,B., Maikap,S., Bera,L.K., Maiti,C.K. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Microwave Plasma Oxidation of Strain-Compensated Si1-x-yGexCy Films Ray,S.K., Bera,L.K., John,S., Banerjee,S.K., Maiti,C.K. Narosa Publishing House	8 Conference Proceedings Structural and Electrical Characterizations of Oxynitride Films on Solid Phase Epitaxially Grown Silicon Carbide Bera, L.K., Choi, W.K., McNeill, D., Ray, S.K., Chatterjee, S., Maiti, C.K. Materials Research Society
3 Conference Proceedings Fabrication of Planar Inductor on Low Resistivity Silicon Substrates for RF Applications Senapati,B., Bera,L.K., Banerjee,H.D., Maiti,C.K. SPIE - The International Society for Optical Engineering	9 Conference Proceedings Electrical Properties of Ultrathin Stacked SiO2/ZrO2 Gate Dielectrics Chatterjee, S., Samanta, S.K., Banerjee, H.D., Maiti, C.K. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Low Temperature Characteristics of Pt/p-Strained-Si Schottky Diodes Chattopadhyay,S., Bera,L.K., Ray,S.K., Bose,P.K., Maiti,C.K. Narosa Publishing House	10 Conference Proceedings Strained-Si MOSFETs for Low-Power Applications T.K. Maiti, T. Das, P.S. Das, S.K. Sarkar, C.K. Maiti Electrochemical Society
5 Conference Proceedings Oxidation Studies on Strained SiGe Layer Using Microwave Oxygen Plasma Mukhopadhyay,M., Ray,S.K., Maiti,C.K. SPIE-The International Society for Optical Engineering, Narosa	11 Conference Proceedings Properties of Plasma Oxynitride Films on Strained SiGe Mukhopadhyay, M., Bera, L. K., Ray, S. K., Maiti, C. K. MRS - Materials Research Society
6 Conference Proceedings Schottky Barrier Heights of Au on Strained Layer Si1-xGex Films Bera,L.K., Maiti,C.K., Dutta,A., Mukhopadhyay,M., Ray,S.K., Lahiri,S.K. SPIE-The International Society for Optical Engineering, Narosa	12 Conference Proceedings Dielectric Relaxation and Defect Generation Under Pulsed and Constant Voltage Stressing of Ultrathin TiO₂ Films on … M.K. Bera, S. Saha, C.K. Maiti Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12