Study of Plasma Ion Implanted Hydrogen in Semi-Insulating GaAs

Study of Plasma Ion Implanted Hydrogen in Semi-Insulating GaAs

Author(s):

Publication title:

Physics of - Semiconductor Devices -

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3316

Pub. Year:

1998

Vol.:

Part 1

Page(from):

369

Page(to):

372

Pub. info.:

New Delhi: Narosa Publishing House

ISSN:

0277786X

ISBN:

9780819427564 [081942756X]

Language:

English

Call no.:

P63600/3316

Type:

Conference Proceedings

Details

TDL ID:	ZA00016921
Series ID:	PA00000029
Conf. info. (Name):	International Workshop on the Physics of Semiconductor Devices - IWDPSD
Conf. info. (Number):	1997 : 9th
Conf. info. (Venue):	Delhi, India
Conf. info. (Date):	1997.12.16-1997.12.20

Similar Items:

1 Conference Proceedings Cu3Ge,A Novel Contact Material for Semiconductor Device Technology:Room Temperature Synthesis by Ion Beam Mixing Dhar,Sankar, Som,Tapobrata, Mohapatra,Y.N., Kulkarni,V.N. SPIE-The International Society for Optical Engineering, Narosa	7 Conference Proceedings ESR STUDIES OF SEMI-INSULATING GaAs CRYSTALS. BITTEBIERRE,J., COX,R.T., MOLVA,E. Trans Tech Publications
2 Conference Proceedings Defect Level Responsible for Compensation in Deep Buried Layers in n-type Silicon Giri,P.K., Sankar Dhar, Kulkarni,V.N., Mohapatra,Y.N. Narosa Publishing House	8 Conference Proceedings Electrical Signature Of Ion-Implantation Induced Defects In N-Silicon In The Defect Cluster Regime Studied Using Dlts And Isothermal Transient Spectroscopies Singh, Samarendra P., Rao, Vineet, Mohapatra, Y.N., Rangan, Sanjay, Ashok, S. Materials Research Society
3 Conference Proceedings Role of Quasi-Fermi Level in Trap Emission Characteristics of Heavily Damaged Silicon Induced by MeV Ion Implantation Giri,P.K., Mohapatra,Y.N. SPIE - The International Society for Optical Engineering	9 Conference Proceedings Sensitivity of Electrically Active Defect Spectra to Processing Conditions in MeV Heavy Ion Implanted Silicon Mohapatra, Y. N., Giri, P. K. MRS - Materials Research Society
4 Conference Proceedings Surface and Interface Characterization of Ion Beam Re-Crystallized Si Sahoo, P.K., Satpati, B., Dey, S., Satyam, P.V., Som, T., Kulkarni, V.N. Materials Research Society	10 Conference Proceedings Challenges and Opportunities in Studying Deep Defect Dominated Semiconductors: Emerging Issues and Case Studies Mohapatra,Y.N., Agarwal,S., Giri,P.K. Narosa Publishing House
5 Conference Proceedings Carrier Dynamics at Deep Traps in Ion Implanted Silicon : Possible Signature of Defect Clusters Singh, Samarendra P., Mohapatra, Y.N., Rangan, Sanjay, Ashok, S. SPIE-The International Society for Optical Engineering	11 Conference Proceedings ION IMPLANTATION DOPING OF SEMI-INSULATING POLYCRYSTALLINE SILICON Lombardo, Salvatore, Campisano, S. U. MRS - Materials Research Society
6 Conference Proceedings Raman Study On H+Implanted Semi-Insulating GaAs Santhakumar, K., Jayavel, P., Kesavamoorthy, R., Magudapathy, P., Nair, K.G.M., Ravichandran, V. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Optical Studies of Deep Centers in Semi-Insulating SiC Magnusson, B., Aavikko, R., Saarinen, K., Son, N.T., Janzen, E. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12