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Laser-induced solid phase epitaxy of silicon deposited films

Author(s):
  • Roth, J.A. ( Hughes Research Laboratories, Malibu, California 90265 )
  • Olson, G.L. ( Hughes Research Laboratories, Malibu, California 90265 )
  • Kokorowski, S.A. ( Hughes Research Laboratories, Malibu, California 90265 )
  • Hess, L.D. ( Hughes Research Laboratories, Malibu, California 90265 )
Publication title:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
1
Pub. Year:
1981
Page(from):
413
Page(to):
426
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
Language:
English
Call no.:
M23500/1
Type:
Conference Proceedings

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