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Characterization of Al-Si ohmic contacts obtained on shallow junctions by laser and electron beam annealing

Author(s):
  • Armigliato, A. ( CNR-Istituto LAMEL, Via Castagnoli, 1-40126 Bologna, Italy )
  • De Luca, P. ( CNR-Istituto LAMEL, Via Castagnoli, 1-40126 Bologna, Italy )
  • Finetti, M. ( CNR-Istituto LAMEL, Via Castagnoli, 1-40126 Bologna, Italy )
  • Solmi, S. ( CNR-Istituto LAMEL, Via Castagnoli, 1-40126 Bologna, Italy )
Publication title:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
1
Pub. Year:
1981
Page(from):
329
Page(to):
336
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
Language:
English
Call no.:
M23500/1
Type:
Conference Proceedings

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