Laser processing of silicon for advanced microelectronic devices and circuits

Author(s):

• Hess, L.D. ( Hughes Research Laboratories, Malibu, California, USA )
• Kokorowski, S.A. ( Hughes Research Laboratories, Malibu, California, USA )
• Olson, G.L. ( Hughes Research Laboratories, Malibu, California, USA )
• Yaron, G. ( Hughes Research Laboratories, Malibu, California, USA )

Publication title:

Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposia proceedings

Ser. no.:

1

Pub. Year:

1981

Page(from):

307

Page(to):

319

Pub. info.:

New York: North Holland

ISSN:

02729172

ISBN:

9780444005953 [0444005951]

Language:

English

Call no.:

M23500/1

Type:

Conference Proceedings