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Beam annealing of ion-implanted GaAs and InP

Author(s):
  • Fan, J.C.C. ( Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173 )
  • Chapman, R.L. ( Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173 )
  • Donnelly, J.P. ( Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173 )
  • Turner, G.W. ( Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173 )
  • Bozler, C.O. ( Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173 )
Publication title:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
1
Pub. Year:
1981
Page(from):
261
Page(to):
274
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
Language:
English
Call no.:
M23500/1
Type:
Conference Proceedings

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