GROWTH, PROPERTIES AND APPLICATIONS OF EPITAXIAL SILICDES
- Author(s):
- Mantl S.
- Publication title:
- Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
- Title of ser.:
- NATO ASI series. Series E, Applied sciences
- Ser. no.:
- 234
- Pub. Year:
- 1993
- Page(from):
- 445
- Page(to):
- 469
- Pages:
- 25
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISSN:
- 0168132X
- ISBN:
- 9780792322658 [0792322657]
- Language:
- English
- Call no.:
- N11482/234
- Type:
- Conference Proceedings
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