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ION BEAM-BASED CHARACTERIZATION OF MULTICOMPONENT OXIDE THIN FILMS AND THIN FILM LAYERED STRUCTURES

Author(s):
Krauss R. A.
Rangaswamy M.
Lin Y.
Gruen M. D.
Schultz A. J.
Schmidt K. H.
Chang H. P. R.
2 more
Publication title:
Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
234
Pub. Year:
1993
Page(from):
251
Page(to):
281
Pages:
31
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792322658 [0792322657]
Language:
English
Call no.:
N11482/234
Type:
Conference Proceedings

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