MODELLING OF THE INTRINSIC STRESS IN PVD-COATINGS
- Author(s):
- Publication title:
- Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
- Title of ser.:
- NATO ASI series. Series E, Applied sciences
- Ser. no.:
- 234
- Pub. Year:
- 1993
- Page(from):
- 145
- Page(to):
- 149
- Pages:
- 5
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISSN:
- 0168132X
- ISBN:
- 9780792322658 [0792322657]
- Language:
- English
- Call no.:
- N11482/234
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
INFLUENCE OF SPUTTER GAS PRESSURE AND SUBSTRATE BIAS ON INTRINSIC STRESS AND CRYSTALLINITY OF COATINGS PRODUCED BY MAGNETRON SPUTTERING
Kluwer Academic Publishers |
Trans Tech Publications |
Trans Tech Publications |
Society of Vacuum Coaters |
Kluwer Academic Publishers |
Society of Vacuum Coaters |
Society of Vacuum Coaters |
Trans Tech Publications |
Society of Vacuum Coaters |
Trans Tech Publications |
Society of Vacuum Coaters |
Materials Research Society |