Measurement of Surface Form by Laser Profilometry
- Author(s):
- Ennos E. A.
- Publication title:
- Optical metrology : coherent and incoherent optics for metrology, sensing and control in science, industry, and biomedicine
- Title of ser.:
- NATO ASI series. Series E, Applied sciences
- Ser. no.:
- 131
- Pub. Year:
- 1987
- Page(from):
- 13
- Page(to):
- 19
- Pages:
- 7
- Pub. info.:
- Dordrecht: Martinus Nijhoff Publishers
- ISSN:
- 0168132X
- ISBN:
- 9789024735174 [9024735173]
- Language:
- English
- Call no.:
- N11482/131
- Type:
- Conference Proceedings
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