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Growth of Thin Films by UHV Ion Beam Sputtering Deposition Technique

Author(s):
Publication title:
Erosion and growth of solids stimulated by atom and ion beams
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
112
Pub. Year:
1986
Page(from):
457
Page(to):
460
Pages:
4
Pub. info.:
Dordrecht: Martinus Nijhoff Publishers
ISSN:
0168132X
ISBN:
9789024726899 [9024726891]
Language:
English
Call no.:
N11482/112
Type:
Conference Proceedings

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