Surface-micromachined electrostatic diaphragm micropump

Surface-micromachined electrostatic diaphragm micropump

Author(s):

Jang,W.I. ( Electronics and Telecommunications Research Institute )
Lee,Y.I.
Choi,C.A.
Jun,C.H.
Kim,Y.T.

Publication title:

Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3891

Pub. Year:

1999

Page(from):

395

Page(to):

402

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434920 [0819434922]

Language:

English

Call no.:

P63600/3891

Type:

Conference Proceedings

Details

TDL ID:	ZA00016695
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Electronics and structures for MEMS
Conf. info. (Number):	1999
Conf. info. (Venue):	Royal Pines Resort, Queensland, Australia
Conf. info. (Date):	1999.10.27-1999.10.29

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