Characterization of Si nanostructured surfaces

Characterization of Si nanostructured surfaces

Author(s):

Zaidi,S.H. ( Univ.of New Mexico )
Gee,J.M.
Ruby,D.S.
Brueck,S.R.J.

Publication title:

Engineered nanostructural films and materials : 22-23 July 1999, Denver, Colorado

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3790

Pub. Year:

1999

Page(from):

151

Page(to):

159

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819432766 [0819432768]

Language:

English

Call no.:

P63600/3790

Type:

Conference Proceedings

Details

TDL ID:	ZA00016686
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Engineered Nanostructural Films and Materials
Conf. info. (Number):	1999
Conf. info. (Venue):	Denver, CO, USA
Conf. info. (Date):	1999.07.22-1999.07.23

Similar Items:

1 Conference Proceedings Nanoscale fabrication by interferometric lithography Zaidi,S.H., Brueck,S.R.J. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Toward accurate linewidth metrology using atomic force microscopy and tip characterization Dixson,R., Schneir,J., McWaid,T.H., Sullivan,N.T., Tsai,V.W., Zaidi,S.H., Brueck,S.R.J. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Interferometric lithography for nanoscale fabrication Zaidi,S.H., Brueck,S.R.J. SPIE - The International Society for Optical Engineering	8 Conference Proceedings Interferometric lithography exposure tool for 180-nm structures Zaidi,S.H., Brueck,S.R.J., Schellenberg,F.M., Mackay,R.S., Uekert,K., Persoff,J.J. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Nonlinear processes to extend interferometric lithography Zaidi,S.H., Brueck,S.R.J. SPIE - The International Society for Optical Engineering	9 Conference Proceedings Response Surface Methodology (RSM) in Fabrication of Nanostructured Silicon A.W. Azhari, K. Sopian, D.S. Che Halin, A.H. Ibrahim, S.H. Zaidi Trans Tech Publications
4 Conference Proceedings Mix-and-match interferometric and optical lithographies for nanoscale structures Zaidi,S.H., Brueck,S.R.J., Hill,T.A., Shagam,R.N. SPIE-The International Society for Optical Engineering	10 Conference Proceedings SCALABLE FABRICATION AND OPTICAL CHARACTERIZATION OF nm Si STRUCTURES Zaidi, Saleem H., Chu, An-Shyang, Brueck, S. R. J. MRS - Materials Research Society
5 Conference Proceedings Room Temperature Photoluminescence from Manufactured 1-D Si Grating Structures Zaidi, S.H., Chu, A-S., Brueck, S.R.J. Electrochemical Society	11 Conference Proceedings Extension of 193-nm immersion optical lithography to the 22-nm half-pitch node Brueck, S.R.J., Biswas, A.M. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Image reversal at nanometer scales Zaidi,S.H., Chen,X., Brueck,S.R.J. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Sub-Feature Speckle Interferometry: A New Approach to Temperature Measurement Burckel, D., Zaidi, S. H., Brueck, S. R. J. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12