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Characterization of Si-on-insulator buried surfaces by FTIR and scatterometry

Author(s):
Yakovlev,V.A. ( On-Line Technologies Inc. )
Bosch-Charpenay,S.
Rosenthal,P.A.
Solomon,P.R.
Xu,J.
Stover,J.C.
Anc,M.J.
Alles,M.L.
3 more
Publication title:
Optical diagnostic methods for inorganic transmissive materials II : 3-4 August 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4103
Pub. Year:
2000
Page(from):
90
Page(to):
97
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437488 [0819437484]
Language:
English
Call no.:
P63600/4103
Type:
Conference Proceedings

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