Micro-opto-electro-mechanical systems:recent developments and LETI's activities
- Author(s):
- Ollier,E. ( CEA-LETI )
- Mottier,P.L.
- Publication title:
- Applications of optical fiber sensors : 22-24 May 2000, Glasgow, Scotland, United Kingdom
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4074
- Pub. Year:
- 2000
- Page(from):
- 12
- Page(to):
- 21
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437112 [0819437115]
- Language:
- English
- Call no.:
- P63600/4074
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Micro-opto-electro-mechanical systems:recent developments and LETI's activities
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Optical characterization methods of InP-based micro-opto-electro-mechanical systems
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Micro-opto-electro-mechanical systems:recent developments and LETI's activities
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Micro-opto-electro-mechanical systems:recent developments and LETI's activities
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
10
Conference Proceedings
Hybrid intergration of light emitters and detectors with SOI-based micro-opto-electro-mechanical systems (MOEMS)
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |