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Evaluation of gantry control strategies for x-ray steppers

Author(s):
Publication title:
Smart structures and materials 2000 : mathematics and control in smart structures : 6-9 March, 2000, Newport Beach, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3984
Pub. Year:
2000
Page(from):
597
Page(to):
606
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436023 [081943602X]
Language:
English
Call no.:
P63600/3984
Type:
Conference Proceedings

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