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Er-doping in silicon by pulsed laser irradiation

Author(s):
Nakashima, Kenshiro  
Publication title:
Rare earth doped semiconductors : symposium held April 13-15, 1993, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
301
Pub. Year:
1993
Page(from):
61
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558991972 [1558991972]
Language:
English
Call no.:
M23500/301
Type:
Conference Proceedings

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