Growth of Er doped Si films by electron cyclotron resonance plasma enhanced chemical vapor deposition

Growth of Er doped Si films by electron cyclotron resonance plasma enhanced chemical vapor deposition

Author(s):

Publication title:

Rare earth doped semiconductors : symposium held April 13-15, 1993, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

301

Pub. Year:

1993

Page(from):

49

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558991972 [1558991972]

Language:

English

Call no.:

M23500/301

Type:

Conference Proceedings

Details

TDL ID:	ZA00016596
Series ID:	PA00000011
Conf. info. (Name):	Symposium on rare earth doped semiconductors
Conf. info. (Number):	1993
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1993.04.13-1993.04.15

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