Real-Time Monitoring by Spectroscopic Ellipsometry and Desorption Mass Spectroscopy During Molecular Beam Epitaxy of AlGaAs/GaAs at High Substrate Temperatures

Real-Time Monitoring by Spectroscopic Ellipsometry and Desorption Mass Spectroscopy During Molecular Beam Epitaxy of AlGaAs/GaAs at High Substrate Temperatures

Author(s):

Publication title:

In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

569

Pub. Year:

1999

Page(from):

107

Pub. info.:

Warrendale, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994768 [1558994769]

Language:

English

Call no.:

M23500/569

Type:

Conference Proceedings

Details

TDL ID:	ZA00016595
Series ID:	PA00000011
Conf. info. (Name):	Symposium on in situ process diagnostics and modelling
Conf. info. (Number):	1999
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1999.04.06-1999.04.07

Similar Items:

1 Conference Proceedings A Kinetic Monte Carlo Model for Ga Desorption From Chemisorbed and Physisorbed States During High-Temperature GaAs MBE Mahalingam, K., Dorsey, D. L., Taferner, W. T., Eyink, K. G. MRS - Materials Research Society	7 Conference Proceedings Surface Passivation for Low-Temperature UHV Wafer Bonding of GaAs Substrates Hesse, P.J., Haas, T.W., Lampert, W.V., Eyink, K.G., Tomich, D.H., Seaford, M.L. Electrochemical Society
2 Conference Proceedings INCORPORATION OF EXCESS ARSENIC GaAs AND A1GaAs EPILAYERS GROWNT AT ALOW SUBSTRATE TEMPERATURES BY MOLECULAR BEAM EPITAXY Melloch, M.R., Otsuka, N., Mahalingam, K., Warren, A.C., Woodall, J.M., Kirchner, P.D. Materials Research Society	8 Conference Proceedings Real-Time Monitoring of Semiconductor Growth by Spectroscopic Ellipsometry Johs, B., Hale, J., Herzinger, C., Doctor, D., Elliott, K., Olson, G., Chow, D., Roth, J., Ferguson, I., Pelczynski, M., … MRS - Materials Research Society
3 Conference Proceedings Characterization and Modeling of GaAs/AlGaAs P-Type Multi-Quantum Wells for Infared Detection at Normal Incidence Brown, G.J., Taferner, W.T., Hedge, S.M., Eyink, K.G., Szmulowicz, F., Mitchel, W.C., Solomon, J., Walck, S.D. Electrochemical Society	9 Conference Proceedings Quantitative High-Resolution Transmission Electron Microscopy of III -V Semiconductor Interfaces by Multivariate Statistical Analysis of Exit-Plane Wave … Mahalingam, krishnamurthy, Eyink, Kurt G., Brown, Gail J., Dorsey, Donald L. Materials Research Society
4 Conference Proceedings In Situ Spectroscopic Ellipsometry for Real-Time Composition Control of Hg1-x CdxTe Grown by Molecular-Beam Epitaxy Dat, R., Aqariden, F., Duncan, W. M., Chandra, D., Shih, H. D. MRS - Materials Research Society	10 Conference Proceedings A MONTE CARLO MODEL OF GaAs [111]B EPITAXY Dorsey, Donald L., Venkatasubramanian, R., Yen, M. Y., Haas, T. W. MRS - Materials Research Society
5 Conference Proceedings In Situ Spectroscopic Ellipsometry for Real-Time Composition Control of Hg1-xCdxTe Grown by Molecular-Beam Epitaxy Dat, R., Aqariden, F., Duncan, W. M., Chandra, D., Shih, H. D. MRS - Materials Research Society	11 Conference Proceedings MOLECULAR BEAM EPITAXY OF LOW TEMPERATURE GROWN GaAs PHOTOCONDUCTORS Dykaar, D.R., Eaglesham, D.J., Keil, U.D., Greene, B.I., Saeta, P.N., Pfeiffer, L.N., Kopf, R.F., Darack, S.B., West, … Materials Research Society
6 Conference Proceedings In Situ Spectroscopic Ellipsometry for Monitoring and Control of HgCdTe Heterostructures Grown by Molecular Beam Epitaxy Almeida, L. A., Bevan, M. J., Duncan, W. M., Shih, H. D. MRS - Materials Research Society	12 Conference Proceedings FILMS GROWN ON VICINAL GaAs ( --- ) SUBSTRATES BY MOLECULAR BEAM EPITAXY Yang, K., Schowalter, L. J. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12