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Modelling and Real-Time Process Monitoring of Organometallic Chemical Vapor Deposition of III-V Phosphides and Nitrides at Low and High Pressures

Author(s):
Bachmann, K. J.
Cardelino, B. H.
Moore, C. E.
Cardelino, C. A.
Sukidi, N.
McCall, S.
1 more
Publication title:
In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
569
Pub. Year:
1999
Page(from):
59
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994768 [1558994769]
Language:
English
Call no.:
M23500/569
Type:
Conference Proceedings

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