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Characterization of Tetrahedrally Bonded Amorphous Carbon Via Capacitance Techniques

Author(s):
Publication title:
Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
509
Pub. Year:
1998
Page(from):
119
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994157 [1558994157]
Language:
English
Call no.:
M23500/509
Type:
Conference Proceedings

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