Low-Level Cu Contamination of Silicon During Wet Cleaning Studied by Transient Ion Drift

Low-Level Cu Contamination of Silicon During Wet Cleaning Studied by Transient Ion Drift

Author(s):

Publication title:

Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

469

Pub. Year:

1997

Page(from):

475

Pub. info.:

Pittsburg, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993730 [1558993738]

Language:

English

Call no.:

M23500/469

Type:

Conference Proceedings

Details

TDL ID:	ZA00016586
Series ID:	PA00000011
Conf. info. (Name):	Symposium on defects and diffusion in silicon processing
Conf. info. (Number):	1997
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1997.04.01-1997.04.04

Similar Items:

1 Conference Proceedings Studies of the Microscopic Nature of Cu Pairs in Silicon Istratov, A. A., Heiser, T., Hieslmair, H., Flink, C., Weber, E. R. MRS - Materials Research Society	7 Conference Proceedings Interactions of Structural Defects with Metallic Impurities in Multicrystalline Silicon McHugo, S. A., Hieslmair, H., Weber, E. R., Rosenblum, M. D., Kalejs, J. P. MRS - Materials Research Society
2 Conference Proceedings Copper in silicon:quantitative analysis of internal and proximity gettering McHugo,S.A., Heiser,T., Hieslmair,H., Flink,C., Weber,E.R., Myers,S.M., Petersen,G.A. Trans Tech Publications	8 Conference Proceedings Rate limiting mechanism of transition metal gettering in multicrystalline silicon McHugo,S.A., Thompson,A.C., Imaizumi,M., Hieslmair,H., Weber,E.R. Trans Tech Publications
3 Conference Proceedings Iron and Nickel Solubilities in Heavily-Doped Silicon and Their Energy Levels in the Silicon Bandgap at Elevated Temperatures McHugo, S. A., McDonald, R. J., Smith, A. R., Hurley, D. L., Istratov, A. A., Hieslmair, H., Weber, E. R. MRS - Materials Research Society	9 Conference Proceedings Charge State of Copper-Silicide Precipitates in Silicon and Its Application to the Understanding of Copper Precipitation Kinetics Istratov, A. A., Vyvenko, O. F., Flink, C., Heiser, T., Hieslmair, H., Weber, E. R. MRS - Materials Research Society
4 Conference Proceedings Precipitation of iron in FZ and CZ silicon Hieslmair,H., Istratov,A.A., McHugo,S.A., Flink,C., Weber,E.R. Trans Tech Publications	10 Conference Proceedings Progress in Understanding the Physics of Copper in Silicon* Istratov, A.A., Funk, C., Baluasubramanian, S., Weber, E.R., Hieslmair, H., McHugo, S.A., Hedemano, H., Seiht, M., … Electrochemical Society
5 Conference Proceedings A study of the copper-pair related centers in silicon Istratov,A.A., Heiser,T., Hieslmair,H., Flink,C., Kruger,J., Weber,E.R. Trans Tech Publications	11 Conference Proceedings Progress in Understanding the Physics of Copper in Silicon Istratov,A.A., Flink,C., Baluasubramanian,S., Weber,E.R., Hieslmair,H., McHugo,S.A., Hedemann,H., Seibt,M., Schroter,W. Electrochemical Society, SPIE-The International Society for Optical Engineering
6 Conference Proceedings ANALYSIS OF IRON PRECIPITATION IN SILICON AS A BASIS FOR GETIERING SIMULATIONS Hieslmair, H., Istratov, A.A., McHugo, S.A., Flink, C., Weber, E.R. Electrochemical Society	12 Conference Proceedings ELECTRICAL AND RECOMBINATIVE PROPERTIES OF PRECIPTATED AND INTERSTITIAL COPPER IN SILICON Istratov, A.A., Hedemann, H., Seibt, M., Vyvenko, O.F., Schroeter, W., Flink, C., Heiser, T., Hieslmair, H., Weber, E.R. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12