Origins of Residual Stress in Mo and Ta Films: The Role of Impurities, Microstructural Evolution, and Phase Transformations

Origins of Residual Stress in Mo and Ta Films: The Role of Impurities, Microstructural Evolution, and Phase Transformations

Author(s):

Publication title:

Thin films, stresses and mechanical properties VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

436

Pub. Year:

1997

Page(from):

505

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993396 [1558993398]

Language:

English

Call no.:

M23500/436

Type:

Conference Proceedings

Details

TDL ID:	ZA00016583
Series ID:	PA00000011
Conf. info. (Name):	Symposium on thin films
Conf. info. (Number):	6th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1996.04.08-1996.04.12

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