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Thin Film Polymer Stress Measurement Using Piezoresistive Anisotropically Etched Pressure Sensors

Author(s):
Bitko, G.
Harries, R.
Matkin, J.
McNeil, A. C.
Monk, D. J.
Shah, M.
Wertz, J.
2 more
Publication title:
Thin films, stresses and mechanical properties VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
436
Pub. Year:
1997
Page(from):
365
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993396 [1558993398]
Language:
English
Call no.:
M23500/436
Type:
Conference Proceedings

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