Study of Microstructure and Gas Sensing Properties of Tin Oxide Thin Films Prepared by Metal Organic Chemical Vapor Deposition

Study of Microstructure and Gas Sensing Properties of Tin Oxide Thin Films Prepared by Metal Organic Chemical Vapor Deposition

Author(s):

Publication title:

Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

415

Pub. Year:

1996

Page(from):

237

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993181 [1558993185]

Language:

English

Call no.:

M23500/415

Type:

Conference Proceedings

Details

TDL ID:	ZA00016581
Series ID:	PA00000011
Conf. info. (Name):	Symposium on metal-organic chemical vapor deposition of electronic ceramics
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1995.11.27-1995.11.29

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