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Stress Evolution in Ultra Thin Sputtered Films

Author(s):
Publication title:
Surface/interface and stress effects in electronic material nanostructures : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
405
Pub. Year:
1996
Page(from):
475
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993082 [1558993088]
Language:
English
Call no.:
M23500/405
Type:
Conference Proceedings

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