Blank Cover Image

TFT Performance-Material Quality Correlation for a-Si:H Deposited at High Rates

Author(s):
Publication title:
Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
377
Pub. Year:
1995
Page(from):
749
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992801 [1558992804]
Language:
English
Call no.:
M23500/377
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High Deposition Rate a-Si:H for the Flat-Panel Display Industry

Hautala, J., Saleh, Z., Westendorp, J. F. M., Meiling, H., Sherman, S., Wagner, S.

MRS - Materials Research Society
7 Conference Proceedings Electrical Stability of a-Si:H TFTs Fabricated at 150°C

Gleskova, H., Wagner, S.

Materials Research Society
2 Conference Proceedings High Deposition Rate a-Si:H for the Flat Panel Display Industry

Hautala, J., Saleh, Z., Westendorp, J. F. M., Meiling, H., Sherman, S., Wagner, S.

MRS - Materials Research Society
8 Conference Proceedings Material Properties of Hot-Wire Deposited Silicon TFTs

Brockhoff, A.M., Meiling, H., Habraken, F. H. P. M., Schropp, R. B. I.

Electrochemical Society
3 Conference Proceedings The Substrate's Effect on PECVD Silicon Nitride

Sherman, S., Wagner, S., Mucha, J., Gottscho, R.

Electrochemical Society
9 Conference Proceedings a-Si:H TFTs Made on Polyimide Foil by PE-CVD at 150｡?C

Gleskova, H., Wagner, S., Suo, Z.

MRS - Materials Research Society
4 Conference Proceedings High-Rate a-Si:H for TFTs: A Comparative Study

Meiling, H., van der Weg, W.F., Schropp, R.E.I., Holleman, J.

Electrochemical Society
10 Conference Proceedings Very Low Off Current Behavior in High Performance a-Si:H TFT

Yoon, J.-K., Choi, W.-S., Jang, Y.-H., Seo, S.-M.

MRS - Materials Research Society
5 Conference Proceedings High Performance a-Si:H(:Cl) TFT

Kim, S.K., Lee, K.S., Choi, J.H., Kim, C.S., Jang, J.

Electrochemical Society
11 Conference Proceedings Overlay Alignment in a-Si:H TFTs Fabricated on Foil Substrates

H. Gleskova, I. Cheng, A.Z. Kattamis, S. Wagner, Z. Suo

Electrochemical Society
6 Conference Proceedings Rugged a-Si:H TFTs on Plastic Substrates

Gleskova, H., Suo, Z., Wagner, S.

Materials Research Society
12 Conference Proceedings EFFECT OF INTERFACE AND SURFACE ON THE PERFORMANCE OF a-Si:H TFTs

Jang, J., Jung, M.Y., Yoo, S.S., Song, H.K., Jun, J.M.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12