Amorphous-to-Microcrystalline Silicon Transition in Hot-Wire Chemical Vapor Deposition

Amorphous-to-Microcrystalline Silicon Transition in Hot-Wire Chemical Vapor Deposition

Author(s):

Publication title:

Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

377

Pub. Year:

1995

Page(from):

57

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992801 [1558992804]

Language:

English

Call no.:

M23500/377

Type:

Conference Proceedings

Details

TDL ID:	ZA00016578
Series ID:	PA00000011
Conf. info. (Name):	Symposium on amorphous silicon technology
Conf. info. (Number):	1995
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1995.04.18-1995.04.21

Similar Items:

1 Conference Proceedings Post-Deposition Annealing and Hydrogenation of Hot-Wire Amorphous and Microcrystalline Silicon Films Conde, J. P., Brogueira, P., Chu, V. MRS - Materials Research Society	7 Conference Proceedings Atomic Force Microscopy Study of Initial Nucleation in the Deposition of nc-Si:H Brogueira, P., Chu, V., Conde, J. P. Materials Research Society
2 Conference Proceedings The Influence of Hydrogen Dilution and Substrate Temperature in Hot-Wire Deposition of Amorphous and Microcrystalline Silicon with Filament Temperatures Between … Conde, J. P., Brogueira, P., Castanha, R., Chu, V. MRS - Materials Research Society	8 Conference Proceedings Electromechanical Properties of Amorphous and Microcrystalline Silicon Micromachined Structures Gaspar, J., Boucinha, M., Chu, V., Conde, J.P. Materials Research Society
3 Conference Proceedings Doping Of Amorphous And Microcrystalline Silicon Films By Hot-Wire CVD And RF-PECVD At Low Substrate Temperatures On Plastic Substrates Alpuim, P., Chu, V., Conde, J. P. Materials Research Society	9 Conference Proceedings Structural and Optoelectronic Properties of Amorphous and Microcrystalline Silicon Deposited by Low Substrate Temperatures by RF and HW CVD Alpuim, P., Chu, V., Conde, J. P. Materials Research Society
4 Conference Proceedings Possible Origin of Large Response Times and Ambipolar Diffusion Lengths in Hot-Wire-CVD Silicon Films Schwarz, R., Murias, T., Conde, J. P., Brogueira, P., Chu, V. MRS - Materials Research Society	10 Conference Proceedings Optoelectronic Properties of High-Gap Amorphous Silicon-Carbon Alloys Chu, V., Conde, J. P., Brogueira, P., Micaelo, P., Jarego, J. P., Silva, M. F. da, Soares, J. C. MRS - Materials Research Society
5 Conference Proceedings LOW FILAMENT TEMPERATURE DEPOSITION OF a-Si:H BY CATALYTIC CHEMICAL VAPOR DEPOSITION Brogueira, P., Grebner, S., Wang, F., Schwarz, R., Chu, V., Conde, J.P. Materials Research Society	11 Conference Proceedings Structure and Optoelectronic Properties as a Function of Hydrogen Dilution of Microcrystalline Silicon Films Prepared by Hot Wire Chemical Vapor Deposition Han, D., Lin, J., Wang, Q., Yue, G. Materials Research Society
6 Conference Proceedings Lifetime Regime In The Electrically-Detected Transient Grating Method Applied To Amorphous and Microcrystalline Silicon Films Sanguino, P., Niehus, M., Koynov, S., Brogueira, P., Schwarz, R., Conde, J.P., Chu, V., Schiff, E.A. Materials Research Society	12 Conference Proceedings The Use Of Seed Layers In Hot Wire Chemical Vapor Deposition Of Microcrystalline Silicon Films Zaharias, G.A., Mahan, A.H., Schropp, R.E.I., Xu, Y., Williamson, D.L., Al-Jassim, M.M., Romero, M.J., Gedvilas, L.M. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12