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MORPHOLOGY AND STEP COVERAGE OF IN-SITU DOPED POLYSILICON FILMS DEPOSITED BY SINGLE WAFER CVD

Author(s):
Publication title:
Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
355
Pub. Year:
1995
Page(from):
89
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992566 [1558992561]
Language:
English
Call no.:
M23500/355
Type:
Conference Proceedings

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